Ústav technické a experimentální fyziky Institute of Experimental and Applied Physics

3D active edge silicon sensors with different electrode configurations: Radiation hardness and noise performance

NázevTitle
3D active edge silicon sensors with different electrode configurations: Radiation hardness and noise performance3D active edge silicon sensors with different electrode configurations: Radiation hardness and noise performance
Druh výsledkuResult type
Článek v časopiseJournal article
AutořiAuthors
C. Da Via, E. Bolle, S. Pospíšil, T. Slavíček, V. Linhart
DOIDOI
10.1016/j.nima.2009.03.049
Časopis / citaceJournal / citation
Nuclear Instruments and Methods in Physics Research, Section A, Accelerators, Spectrometers, Detectors and Associated Equipment. 2009, 2009(604), 505-511. ISSN 0168-9002.
RokYear
2009
JazykLanguage
eng
WoSWoS
000267198700011
ScopusScopus
2-s2.0-65649110142
RIVRIV
RIV/68407700:21670/09:00165980!RIV10-MSM-21670___
ProjektProject
Spolupráce ČR s CERNCollaboration of the Czech Republic with CERN

AbstraktAbstract

3D detectors, with electrodes penetrating the entire silicon wafer and active edges, were fabricated at the Stanford Nano Fabrication Facility (SNF), California, USA, with different electrode configurations. After irradiation with neutrons up to a fluence of 8.8 x 10(15) n(eq)cm(-2), they were characterised using an infrared laser tuned to inject similar to 2 minimum ionising particles showing signal efficiencies as high as 66% for the configuration with the shortest (56 mu m) inter-electrode spacing. Sensors from the same wafer were also bump-bonded to the ATLAS FE-13 pixel readout chip and their noise characterised. Most probable signal-to-noise ratios were calculated before and after irradiation to be as good as 38:1 after the highest irradiation level with a substrate thickness of 210 mu m. These devices are promising candidates for application at the LHC such as the very forward detectors at ATLAS and CMS, the ATLAS B-Layer replacement and the general pixel upgrade.

3D detectors, with electrodes penetrating the entire silicon wafer and active edges, were fabricated at the Stanford Nano Fabrication Facility (SNF), California, USA, with different electrode configurations. After irradiation with neutrons up to a fluence of 8.8 x 10(15) n(eq)cm(-2), they were characterised using an infrared laser tuned to inject similar to 2 minimum ionising particles showing signal efficiencies as high as 66% for the configuration with the shortest (56 mu m) inter-electrode spacing. Sensors from the same wafer were also bump-bonded to the ATLAS FE-13 pixel readout chip and their noise characterised. Most probable signal-to-noise ratios were calculated before and after irradiation to be as good as 38:1 after the highest irradiation level with a substrate thickness of 210 mu m. These devices are promising candidates for application at the LHC such as the very forward detectors at ATLAS and CMS, the ATLAS B-Layer replacement and the general pixel upgrade.