Sputtered Type S Thermocouple on Quartz Glass Substrates
- NázevTitle
- Sputtered Type S Thermocouple on Quartz Glass SubstratesSputtered Type S Thermocouple on Quartz Glass Substrates
- Druh výsledkuResult type
- Příspěvek ve sborníkuProceedings paper
- AutořiAuthors
- B. Sopko, J. Vlk, V. Sopko, D. Chren, J. Dammer
- Klíčová slovaKeywords
- sputtering, thermocouple
- KonferenceConference
- Applied mechanics 2011 (Velké Bílovice, 2011-04-18)
- Časopis / citaceJournal / citation
- In: Applied mechanics 2011, Ústav fyziky materiálů AV ČR, 2011, pp. 292-295
- RokYear
- 2011
- JazykLanguage
- eng
- ZáznamyRecords
- ProjektProject
- Selektivní detekce acetonu v lidském dechu - elektrochemický senzorSelective detection of acetone in human breath - electrochemical sensor
- Citace ke staženíDownload citation
- TXT · BibTeX
AbstraktAbstract
The work deals with the development of thin film thermocouples and their practical use. The principle of measuring planar thin film thermocouples is the same as for conventional thermocouples and is based on the thermoelectric effect, which named after its discoverer, Seebeck. Seebeck effect is direct conversion of temperature differences to electric voltage. In different applications it is necessary to use temperature sensors with high spatial resolution and short response time. For this application are currently used planar thermocouples with important advantage in production price and reproducible production. The disadvantage of some methods of preparation of thin films, chemical methods such as exclusion from vapour deposition (CVD), but the productivity of small (low deposition rate) and the risk of entrainment of various contaminants into the coating.
The work deals with the development of thin film thermocouples and their practical use. The principle of measuring planar thin film thermocouples is the same as for conventional thermocouples and is based on the thermoelectric effect, which named after its discoverer, Seebeck. Seebeck effect is direct conversion of temperature differences to electric voltage. In different applications it is necessary to use temperature sensors with high spatial resolution and short response time. For this application are currently used planar thermocouples with important advantage in production price and reproducible production. The disadvantage of some methods of preparation of thin films, chemical methods such as exclusion from vapour deposition (CVD), but the productivity of small (low deposition rate) and the risk of entrainment of various contaminants into the coating.