Sputtered Type S Thermocouples on Quartz Glass Substrate
- NázevTitle
- Sputtered Type S Thermocouples on Quartz Glass SubstrateSputtered Type S Thermocouples on Quartz Glass Substrate
- Druh výsledkuResult type
- Příspěvek ve sborníkuProceedings paper
- AutořiAuthors
- B. Sopko, J. Vlk, V. Sopko, J. Mengler, V. Hynek, J. Dammer, D. Chren
- Časopis / citaceJournal / citation
- In: Proceedings of the 17th International Conference on Applied Physics of Condensed Matter. Žilina: University of Žilina, 2011. pp. 292-295. 1. ISBN 978-80-554-0386-1.
- JazykLanguage
- eng
- RIVRIV
- RIV/68407700:21220/11:00189609!RIV12-MSM-21220___
- ProjektProject
- Selektivní detekce acetonu v lidském dechu - elektrochemický senzorSelective detection of acetone in human breath - electrochemical sensor
AbstraktAbstract
The principle of measuring thin film thermocouples is identical with conventional thermocouples. Application of thin-film thermocouples Pt / PtRh brings many economic benefits as well as physical. Economic benefits like saving noble metals, the same quality of all thermocouples and increased speed of response, ease installation. Design of thermocouple is from other component as Cr/CrNi so enables usage of thin film technology to prepare them on various substrates (ceramic, plastic etc.). Alternatively, it can be integrated directly into the machine tools.
The principle of measuring thin film thermocouples is identical with conventional thermocouples. Application of thin-film thermocouples Pt / PtRh brings many economic benefits as well as physical. Economic benefits like saving noble metals, the same quality of all thermocouples and increased speed of response, ease installation. Design of thermocouple is from other component as Cr/CrNi so enables usage of thin film technology to prepare them on various substrates (ceramic, plastic etc.). Alternatively, it can be integrated directly into the machine tools.