ÚTEFČVUT Ústav technické a experimentální fyziky ČVUT v PrazeInstitute of Experimental and Applied Physics, CTU in Prague

Fabrication, characterization and simulation of channel stop for n in p-substrate silicon pixel detectors

NázevTitle
Fabrication, characterization and simulation of channel stop for n in p-substrate silicon pixel detectorsFabrication, characterization and simulation of channel stop for n in p-substrate silicon pixel detectors
Druh výsledkuResult type
Článek v časopiseJournal article
AutořiAuthors
G. Thungström, O. Esebamen, D. Krapohl, C. Fröjdh, H.-E. Nilsson, S. Petersson, R. Brenner
Klíčová slovaKeywords
Solid state detectors, radiation-hard detectors, Electronic detector readout concepts (solid-state), p-substrate, inversion layers, cross-talk
KonferenceConference
15th International Workshop on Radiation Imaging Detector (Paris, France, 2013-06-23)
DOIDOI
10.1088/1748-0221/9/07/C07013
Časopis / citaceJournal / citation
Journal of Instrumentation 9(07), C07013-C07013 (2014) · ISSN 1748-0221
RokYear
2014
JazykLanguage
eng
ZáznamyRecords
ProjektProject
Institucionální podpora na rozvoj výzkumné org.Institucionální podpora na rozvoj výzkumné org.; Spolupráce ČR s CERNCollaboration of the Czech Republic with CERN
CitovánoCited by
1 (INSPIRE-HEP)
2015: 1
Plný text (open access)Full text (open access)
https://iopscience.iop.org/article/10.1088/1748-0221/9/07/C07013/pdf
Citace ke staženíDownload citation
TXT · BibTeX

AbstraktAbstract

Silicon detectors made on p-substrates are expected to have a better radiation hardness as compared to detectors made on n-substrates. However, the fixed positive oxide charges induce an inversion layer of electrons in the substrate, which connects the pixels. The common means of solving this problem is by using a p-spray, individual p-stops or a combination of the two. Here, we investigate the use of field plates to suppress the fixed positive charges and to prevent the formation of an inversion layer. The fabricated detector shows a high breakdown voltage and low interpixel leakage current for a structure using biased field plates with a width of 20 μm. By using a spice model for simulation of the preamplifier, a cross talk of about 1.6% is achieved with this detector structure. The cross talk is caused by capacitive and resistive coupling between the pixels.

Silicon detectors made on p-substrates are expected to have a better radiation hardness as compared to detectors made on n-substrates. However, the fixed positive oxide charges induce an inversion layer of electrons in the substrate, which connects the pixels. The common means of solving this problem is by using a p-spray, individual p-stops or a combination of the two. Here, we investigate the use of field plates to suppress the fixed positive charges and to prevent the formation of an inversion layer. The fabricated detector shows a high breakdown voltage and low interpixel leakage current for a structure using biased field plates with a width of 20 μm. By using a spice model for simulation of the preamplifier, a cross talk of about 1.6% is achieved with this detector structure. The cross talk is caused by capacitive and resistive coupling between the pixels.

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